LITHOGRAPHY HOSTPOT DETECTION USING SVM
By Anmol Salvi INTRODUCTION: Lithography can be defined as the process of transferring patterns of a particular geometric shape in a mask to a thin layer of radiation sensitive material called the resist , thus covering the surface of a semiconductor wafer . Lithography hotspots are places which are susceptible to having fatal pinching (open circuits) or bridging (short circuit) , which occurs due to poor printability of some patterns in a given design layout. In order to avoid such undesirable patterns in a layout , it is mandatory to find hotspots in the early design phase. As manufacturing conditions evolve , lithography hotspot detection faces many challenges which include:- a)Real hotspots are extremely hard to find during early design stages and also hard to fix in the post layout phase. b)False alarms are detected which result in expensive post processing hotspot removal. c)Full chip physical verification as well as optimization requires an extremely fast turn-arou...